Enzimba y’ekyuma ekikuba ebifaananyi mu plasma

Ebyuma bya ICP okusinga bibaamu ebitundu bina: ekisenge ekisooka-okufuumuula, ekisenge ky’okukuba, enkola y’okugabira ggaasi n’enkola y’okufuumuula.

(1) Ekisenge ky’obuziba nga tekunnabaawo-

Omulimu gw’ekisenge ekiyitibwa pre-vacuum chamber kwe kulaba nti ekisenge ky’okusiiga (etching chamber) kikuumibwa ku ddaala lya vacuum eryatekebwawo, tekikosebwa mbeera ya bweru (nga enfuufu, omukka gw’amazzi), era kyawula ggaasi ez’obulabe okuva mu kisenge ekiyonjo. Kirimu ekibikka, manipulator, enkola y’okutambuza, oluggi lw’okwekutula n’ebirala.

(2) Ekisenge ky’okukuba ebifaananyi

Ekisenge ky’okukuba ebifaananyi (etching chamber) kye kizimbe ekikulu eky’ebyuma ebikuba ebifaananyi ebya ICP. Kikwata butereevu ku mutindo gw’okukuba, obugulumivu bw’okusiiga, n’obukaluba. Ebitundu ebikulu eby’ekisenge ky’okukuba ebifaananyi bye bino: obusannyalazo obwa waggulu, ekitundu kya leediyo ya ICP, ekitundu kya leediyo ya RF, enkola y’obusannyalazo obwa wansi, enkola y’okufuga ebbugumu, n’ebirala.

(3) Enkola y’okugaba ggaasi

Enkola y’okugabira ggaasi eri kutuusa ggaasi ez’enjawulo ez’okusiiga mu kisenge ky’okukuba, n’okufuga obulungi omutindo gw’okutambula kwa ggaasi n’okutambula okuyita mu kifuga puleesa (PC) n’ekifuga okutambula kw’amasasi (MFC). Enkola y’okugaba ggaasi erimu eccupa y’ensibuko ya ggaasi, payipu y’okutuusa ggaasi, enkola y’okufuga, ekitundu ekitabula n’ebirala.

(4) Enkola ya Vacuum
Waliwo enkola za vacuum bbiri, emu ya kisenge kya pre-vacuum ate endala ya kisenge kya etching. Ekisenge kya pre-vacuum kisengulwa ppampu ey’ebyuma. Omutendera gw’obuziba (vacuum level) mu kisenge kya vacuum nga tegunnabaawo -butuuse ku muwendo ogwateekebwawo, oluggi lw’okwawula lwe lusobola okuggulwawo okukyusa wafer. Ekizimbulukusa mu kisenge ky’okukuba ebifaananyi (etching chamber) kiweebwa ppampu ey’ebyuma ne ppampu ya molekyu. Gaasi ezikolebwa ensengekera mu kisenge ky’okusiiga (etching chamber) nazo zisengulwa enkola ya vacuum.